ASML is seeking a Vacuum Systems Engineer to join our Wilton, Connecticut location in the Defectivity Module Delivery Unit (MDU). Within ASML, the Development and Engineering (D&E) sector is responsible for the specification and design of ASML products throughout a product lifecycle. The Defectivity MDU department is responsible for creating and maintaining the critical environment, including molecular and particle cleanliness, within the vacuum reticle modules inside cutting-edge Extreme Ultraviolet (EUV) lithography machines. As a Vacuum Systems Engineer, you will play a key role in enabling next-generation EUV lithography by creating contamination-free vacuum environments for some of the world's most advanced semiconductor manufacturing systems.
In this role, you will help model and design gas flow from atmosphere to deep vacuum, select appropriate materials, and design cleanliness processes that support vacuum-grade performance in scanner and test-rig environments. The solutions developed in this role directly impact wafer yield, machine availability, and customer productivity.
Leads technically complex vacuum and gas-flow work packages, supports hardware projects and lead designers, owns defined architecture or subsystem deliverables, and drives cross-functional alignment with architects, projects, competences, customer support, and research partners. Focuses on ownership of subsystem-level vacuum and gas-flow solutions while developing broader architecture expertise across the Defectivity domain.
Takes full technical ownership for complex vacuum systems or gas-flow architectures, manages system impacts and cross-functional dependencies, drives resolution through technical uncertainty, and contributes standards, procedures, and evidence-based recommendations across ASML units. Identifies and mitigates risks that could impact customer performance and reliability. Serves as a recognized subject matter expert who influences vacuum and gas-flow strategy across projects, products, and ASML sites.
As a Vacuum Systems Engineer in the Defectivity group, you will work closely with Veldhoven machine conditioning architects, Defectivity MDU architects and leadership to specify vacuum systems and gas flows in scanners and test rigs. Partner with hardware project teams and lead designers to ensure vacuum and gas-flow requirements are successfully integrated throughout the product development lifecycle. Lead the ASML Wilton Engineer guild for machine conditioning architecture and vacuum systems competence onsite.
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Translate the overall system design into a gas-flow and vacuum architecture that meets system requirements.
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Specify vacuum system components, standards, and procedures and ensure they are properly recorded in Technical Product Documentation (TPD).
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Define, model, and execute qualification tests to verify that the architecture or subsystem performs all specified functions and meets all performance and design requirements.
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Support resolution of particle contamination issues through analysis and specification of flushing and venting procedures.
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Specify pump-down and vent procedures that ensure common flow performance.
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Participate in design reviews for test rigs and support functional integration of architectures or subsystems.
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Execute design of experiments for degassing chambers and components on product and process levels.
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Provide surface particulate and vacuum-grade cleanliness support, hands on troubleshoot escalations, and contribute practical recommendations from analysis.
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Transfer vacuum systems knowledge between ASML units and frequently interact with D&E Delivery Teams, functions, competences, customer support, and research.
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Perform analyses and calculations to predict flow architecture or subsystem functionality, including pressure-drop budgeting, flow budgeting, humidification, and gas purity.
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Take direction from ASML System Architects and principal engineering mentors leading critical large-capital-equipment development efforts.
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Follow EHS policies and proactively identify, communicate, and mitigate safety risks.
Minimum education and experience expectations vary by job grade. A bachelor’s degree in a relevant technical field is required; a master’s degree or PhD is preferred depending on role scope, technical depth, and business need.
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JG08: BS degree in a technical field and 5+ years of thorough experience; MS or PhD preferred. Education above a BS can compensate for years of experience depending on the candidate.
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JG09: BS degree in a technical field and 9+ years of substantial experience; MS or PhD preferred. Education above a BS can compensate for years of experience depending on the candidate.
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Solid theoretical and practical experience with vacuum and gas-flow phenomena and applications, preferably in the semiconductor industry will be given priority for hire.
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Internal candidates familiar with Twinscan and vacuum systems ADT, vacuum systems hands-on architecture knowledge, or ASML vacuum system flow modeling will be given priority for hire.
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Vacuum systems and gas-flow architecture: Ability to specify vacuum systems, gas flows, pump-down and vent procedures, and architecture requirements for scanner and test-rig environments.
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Cleanliness, materials, and contamination control: Knowledge of molecular and particle cleanliness, surface particulate behavior, vacuum-grade cleanliness, materials compatibility, desorption issues, and contamination troubleshooting.
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Analysis, modeling, and testing: Ability to plan and execute tests and DOEs, analyze measurement results, perform pressure-drop and flow budgeting, and use evidence to make practical recommendations.
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Documentation and technical communication: Ability to document standards, procedures, requirements, test evidence, and component specifications in Technical Product Documentation and present findings to varied technical audiences.
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Preferred technical skills: Experience with particle transport in flows, rarefied gas flow, plasma physics, electrostatics, surface science, RGA or other vacuum measurement techniques, and calculations or simulations for gas-flow and particle transport.
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Experience using modeling or simulation tools: to predict gas flow, vacuum performance, contamination transport, or thermal-fluid behavior is highly desirable.
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Demonstrate: strong technical writing and communication skills.
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Drives results: Translates technical goals into clear priorities and delivers committed outcomes with quality and ownership.
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Collaborates and communicates effectively: Works across disciplines, suppliers, and stakeholders to align expectations, resolve issues, and transfer knowledge between ASML units.
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Demonstrates self-awareness: Seeks and applies feedback, adapts approach, and improves collaboration in complex or ambiguous environments.
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Values differences: Respects and integrates diverse perspectives to strengthen decision quality and inclusive execution.
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Builds effective teams: Establishes clear goals, roles, accountability, and ways of working while coaching others as applicable.
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Drives vision and purpose: Connects technical direction to business priorities and helps teams stay focused through ambiguity and change.
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Ownership and adaptability: Demonstrates high energy, self-motivation, quick learning, flexibility, and the ability to handle multiple projects and tasks concurrently with minimal guidance.
Why Join ASML?
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Work on technology that enables the world’s leading semiconductor manufacturers.
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Solve highly complex multidisciplinary engineering challenges.
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Collaborate with globally recognized experts in vacuum technology, contamination control, and lithography.
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Influence future EUV and High-NA technology platforms.
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Grow through technical leadership, mentoring, and cross-site collaboration opportunities.
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This is a full-time, regular role based on-site in Wilton, Connecticut.
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This role requires on-site presence to attend in-person work-related events, trainings, and meetings and to support teamwork, collaboration, and innovation.
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A flexible workplace arrangement may be available to employees working in roles conducive to remote work, up to 2 days a week.
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Some travel, up to 10%, within the US and internationally can be expected depending on business needs.
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Routinely required to sit, walk, talk, hear, use hands to keyboard, handle and feel, stoop, kneel, crouch, twist, reach, and stretch.
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Occasionally required to move around campus and lift or move up to 20 pounds.
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There is potential for exposure to strong magnetic fields, high voltage, and currents.
There is potential for exposure to strong magnetic fields, high voltage and currents.
This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.
ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.
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